Development of Dicing Technology Applying Electrophoretic Deposition of Ultrafine Abrasives.

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ژورنال

عنوان ژورنال: TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C

سال: 1991

ISSN: 0387-5024,1884-8354

DOI: 10.1299/kikaic.57.3320